Copper interconnect technology /

Copper interconnect technology /

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Bibliographic Details
Author / Creator:Gupta, Tapan.
Imprint:Dordrecht ; New York : Springer, c2009.
Description:1 online resource (xix, 423 p.) : ill.
Language:English
Subject:
Interconnects (Integrated circuit technology)
Microelectronics.
Copper.
Copper.
Interconnects (Integrated circuit technology)
Microelectronics.
Format: E-Resource Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/8891459
Hidden Bibliographic Details
ISBN:9781441900760
1441900764
9781441900753 (hbk.)
1441900756 (hbk.)
Notes:Includes bibliographical references and index.
Description based on print version record.
Other form:Print version: Gupta, Tapan. Copper interconnect technology. Dordrecht ; New York : Springer, c2009 9781441900753 1441900756

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