%0 E-Resource %0 Book %E Jones, Anthony C. %E Hitchman, Michael L. %E Ritala, Mikko %E Niinisto, Jaako %E Krumdieck, Susan %E Chalker, Paul %E Aspinall, Helen C. %E Pemble, Martyn E. %E Gladfelter, W.L. %E Leese, Barry %I Royal Society of Chemistry %D 2008 %C Cambridge, %G English %@ 9781847558794 : £229.94 %@ 1847558798 : £229.94 %T Chemical vapour deposition ; Precursors, processes and applications %U http://www.rsc.org/publishing/ebooks/2008/9780854044658.asp