Stress-induced phenomena in metallization : Seventh International Workshop on Stress-Induced Phenomena in Metallization, Austin, Texas, 14-16 June 2004 /

Stress-induced phenomena in metallization : Seventh International Workshop on Stress-Induced Phenomena in Metallization, Austin, Texas, 14-16 June 2004 /

Saved in:

Bibliographic Details
Meeting name:	International Workshop on Stress-Induced Phenomena in Metallization (7th : 2004 : Austin, Tex.)
Imprint:	Melville, N.Y. : American Institute of Physics, 2004.
Description:	vii, 272 p. : ill. ; 25 cm.
Language:	English
Series:	AIP conference proceedings, 0094-243X ; v. 741 AIP conference proceedings ; no. 741.
Subject:	Semiconductors -- Defects -- Congresses. Metallic films -- Congresses. Thin film devices -- Defects -- Congresses. Aluminum films -- Congresses. Metallizing -- Congresses. Copper -- Electric properties. Damascening. Electrodiffusion. Integrated circuits -- Defects. Metallizing. Semiconductors -- Defects. Thin film devices -- Defects. Conference papers and proceedings.
Format:	Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/5618771

Hidden Bibliographic Details
Varying Form of Title:	Seventh International Workshop on Stress-Induced Phenomena in Metallization, Austin, Texas, 14-16 June 2004
Other authors / contributors:	Ho, P. S.
ISBN:	0735402256
Notes:	Includes bibliographical references and indexes. Also available on the internet.

Mansueto

Loading map link

Holdings details from Mansueto
Call Number:	QC611.S87 2004
c.1	Available Loan period: standard loan Request from Mansueto Scan and Deliver Need help? - Ask a Librarian