Chemical physics of thin film deposition processes for micro- and nano-technologies /

Chemical physics of thin film deposition processes for micro- and nano-technologies /

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Bibliographic Details
Imprint:	Dordrecht ; Boston : Kluwer Academic Publishers, c2002.
Description:	xiii, 363 p. : ill. ; 25 cm.
Language:	English
Series:	NATO science series. Series II, Mathematics, physics, and chemistry ; . 55
Subject:	Thin films -- Congresses. Nanotechnology -- Congresses. Nanotechnology. Thin films. Conference papers and proceedings.
Format:	Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/4697950

Hidden Bibliographic Details
Other authors / contributors:	Pauleau, Y.
ISBN:	1402005245 (alk. paper) 1402005253 (pbk. : alk. paper)
Notes:	"Published in cooperation with NATO Scientific Affairs Division." Includes bibliographical references and index.

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Call Number:	TA418.9.T45C47 2002
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