Gate dielectric integrity : material, process, and tool qualification /

Gate dielectric integrity : material, process, and tool qualification /

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Bibliographic Details
Imprint:	West Conshocken, Pa. : ASTM, c2000.
Description:	xi, 169 p. : ill. ; 23 cm.
Language:	English
Subject:	Semiconductor wafers -- Reliability. Integrated circuits -- Wafer-scale integration -- Reliability. Gate array circuits -- Materials. Silicon oxide films -- Testing. Dielectrics -- Testing. Dielectrics -- Testing. Gate array circuits -- Materials. Integrated circuits -- Wafer-scale integration -- Reliability. Semiconductor wafers -- Reliability.
Format:	Print Book
URL for this record:	http://pi.lib.uchicago.edu/1001/cat/bib/4604343

Hidden Bibliographic Details
Other authors / contributors:	Gupta, D. C. (Dinesh C.) Brown, George A., 1937- Conference on Gate Dielectric Integrity (1999 : San Jose, Calif.)
ISBN:	0803126158
Notes:	Conference on Gate Dielectric Integrity, held Jan. 25, 1999, San Jose, Calif. Includes bibliographical references.

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Call Number:	TK7871.85.G32 2000
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