User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /
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| Author / Creator: | Lowney, J. R. (Jeremiah Ralph), 1946- |
|---|---|
| Imprint: | Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O., 1994. |
| Description: | iv, 39 p. : ill. ; 28 cm. |
| Language: | English |
| Series: | Semiconductor measurement technology. NIST special publication 400-95 |
| Subject: | |
| Format: | Microform U.S. Federal Government Document Book |
| URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/2341631 |
