Interconnection development for InP-HBT terahertz circuits
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Author / Creator: | Stoppel, Dimitri. |
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Imprint: | Göttingen : Cuvillier Verlag, 2020. |
Description: | 1 online resource (157 pages) |
Language: | English |
Series: | Innovationen mit Mikrowellen und Licht. Forschungsberichte aus dem Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik ; v. 58 Innovationen mit Mikrowellen und Licht. Forschungsberichte aus dem Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik. |
Subject: | Terahertz technology. Printed circuits -- Design and construction. Printed circuits -- Design and construction. Terahertz technology. Electronic books. |
Format: | E-Resource Book |
URL for this record: | http://pi.lib.uchicago.edu/1001/cat/bib/12651001 |
Table of Contents:
- Intro
- 1. Introduction
- 2. InP HBT transferred-substrate process
- 3. Plasma etching of benzocyclobutene
- 4. Nickel chrome thin film resistors
- 5. Through silicon vias in atransferred-substrate process
- 6. Summary
- List of Figures
- List of Tables
- Bibliography
- Appendix A Publications
- Appendix B Acronyms