Femtosecond laser 3D micromachining for microfluidic and optofluidic applications /

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Bibliographic Details
Author / Creator:Sugioka, Kōji, author.
Imprint:London : Springer, [2013?]
©2014
Description:1 online resource (ix, 129 pages) : illustrations (some color).
Language:English
Series:SpringerBriefs in Applied Sciences and Technology, 2191-530X
SpringerBriefs in applied sciences and technology,
Subject:
Format: E-Resource Book
URL for this record:http://pi.lib.uchicago.edu/1001/cat/bib/11080991
Hidden Bibliographic Details
Other authors / contributors:Cheng, Ya, author.
ISBN:9781447155416
1447155416
9781447155409
Notes:Includes bibliographical references.
Online resource; title from PDF title page (SpringerLink, viewed October 1, 2013).
Summary:Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfludics, micromechanics, microelectronics, and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfludic, optofludic, and lab-on-a-chip devices, and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfludics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent, and practical applications to biochemical analysis.
Standard no.:10.1007/978-1-4471-5541-6

MARC

LEADER 00000cam a2200000Ki 4500
001 11080991
005 20170630044806.4
006 m o d
007 cr cnu|||unuuu
008 131016t20132014enka ob 000 0 eng d
003 ICU
040 |a GW5XE  |b eng  |e rda  |e pn  |c GW5XE  |d YDXCP  |d N$T  |d COO  |d EBLCP  |d OCLCF  |d BEDGE  |d OCLCQ  |d ZMC  |d DEBSZ  |d DIBIB  |d Z5A 
020 |a 9781447155416  |q (electronic bk.) 
020 |a 1447155416  |q (electronic bk.) 
020 |z 9781447155409 
024 7 |a 10.1007/978-1-4471-5541-6  |2 doi 
035 |a (OCoLC)860834964 
050 4 |a TA1677 
072 7 |a TDPB  |2 bicssc 
072 7 |a TEC027000  |2 bisacsh 
072 7 |a TEC  |x 009070  |2 bisacsh 
049 |a MAIN 
100 1 |a Sugioka, Kōji,  |e author.  |0 http://id.loc.gov/authorities/names/no2002068001  |1 http://viaf.org/viaf/94974375 
245 1 0 |a Femtosecond laser 3D micromachining for microfluidic and optofluidic applications /  |c Koji Sugioka, Ya Cheng. 
264 1 |a London :  |b Springer,  |c [2013?] 
264 4 |c ©2014 
300 |a 1 online resource (ix, 129 pages) :  |b illustrations (some color). 
336 |a text  |b txt  |2 rdacontent  |0 http://id.loc.gov/vocabulary/contentTypes/txt 
337 |a computer  |b c  |2 rdamedia  |0 http://id.loc.gov/vocabulary/mediaTypes/c 
338 |a online resource  |b cr  |2 rdacarrier  |0 http://id.loc.gov/vocabulary/carriers/cr 
490 1 |a SpringerBriefs in Applied Sciences and Technology,  |x 2191-530X 
505 0 0 |t Current Techniques for Fabricating Microfluidic and Optofluidic Devices --  |t Fundamentals of Femtosecond Laser Processing --  |t Fabrication of Microfluidic Structures in Glass --  |t Fabrication of Fluid Control Microdevices --  |t Fabrication of Micro-optical Components in Glass --  |t Selective Metallization of Glass --  |t Integration of Microcomponents --  |t Applications of Biochips Fabricated by Femtosecond Lasers --  |t Summary and Outlook. 
504 |a Includes bibliographical references. 
520 |a Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfludics, micromechanics, microelectronics, and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfludic, optofludic, and lab-on-a-chip devices, and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfludics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent, and practical applications to biochemical analysis. 
588 0 |a Online resource; title from PDF title page (SpringerLink, viewed October 1, 2013). 
650 0 |a Femtosecond lasers.  |0 http://id.loc.gov/authorities/subjects/sh2009000686 
650 0 |a Laser ablation.  |0 http://id.loc.gov/authorities/subjects/sh94002044 
650 0 |a Microfluidics.  |0 http://id.loc.gov/authorities/subjects/sh2005000678 
650 0 |a Optofluidics.  |0 http://id.loc.gov/authorities/subjects/sh2009007454 
650 1 4 |a Engineering. 
650 2 4 |a Nanotechnology and Microengineering. 
650 2 4 |a Laser Technology, Photonics. 
650 2 4 |a Optical and Electronic Materials. 
650 2 4 |a Optics, Optoelectronics, Plasmonics and Optical Devices. 
650 7 |a TECHNOLOGY & ENGINEERING  |x Mechanical.  |2 bisacsh 
650 7 |a Ingénierie.  |2 eclas 
650 7 |a Femtosecond lasers.  |2 fast  |0 (OCoLC)fst01747414 
650 7 |a Laser ablation.  |2 fast  |0 (OCoLC)fst00992775 
650 7 |a Microfluidics.  |2 fast  |0 (OCoLC)fst01736696 
650 7 |a Optofluidics.  |2 fast  |0 (OCoLC)fst01748804 
655 4 |a Electronic books. 
655 0 |a Electronic books. 
655 7 |a Ebook.  |2 local 
700 1 |a Cheng, Ya,  |e author.  |0 http://id.loc.gov/authorities/names/n2010182355  |1 http://viaf.org/viaf/181145003307461300316 
830 0 |a SpringerBriefs in applied sciences and technology,  |x 2191-530X  |0 http://id.loc.gov/authorities/names/no2011104880 
856 4 0 |u http://link.springer.com/10.1007/978-1-4471-5541-6  |y SpringerLink 
903 |a HeVa 
929 |a eresource 
999 f f |i 45ae5976-7a6e-5673-b1df-4e662613700b  |s 87339a2d-3aac-5615-bd66-650db4934d1e 
928 |t Library of Congress classification  |a TA1677  |l Online  |c UC-FullText  |u http://link.springer.com/10.1007/978-1-4471-5541-6  |z SpringerLink  |g ebooks  |i 9891219